A Comparative Study of CdS Thin Films Grown by Chemical-Bath Deposition and Close-Spaced Sublimation

摘要

In this work we study the properties of cadmium sulfide thin films grown by chemical-bath deposition and close-spaced sublimation, on SnO_2/borosilicate glass and SnO_2/silicon substrates, before and after treatment in vapor CdCl_2 at 400℃ for 5 minutes. The as-deposited CBD CdS films had cubic structure, poor crystallinity, and high density of planar defects. After the CdCl_2 treatment, these films recrystallized to the hexagonal structure, with improved crystallinity and a decrease in the density of planar defects. The as-deposited CSS films had hexagonal structure, better crystallinity, and lower density of planar defects. The main effect of the CdCl_2 treatment was a decrease in the intragrain strain in the films. The CBD films had smaller grains and provided a good conformal coverage over the SnO_2 films. In contrast to these films, CSS CdS did not have any oxygen or chlorine in its bulk.