Digital Readout Electronics for Micro-Machined Gyroscopes with Enhanced Sensor Design

摘要

This paper reports about a digital readout electronics by the example for micro-machined gyroscopes realized according to the decoupling principle DAVED (DECOUPLED ANGULAR VELOCITY DETECTOR). The decoupling principle is applied to reduce the so-called quadrature signal and thus the improvement of the sensor performance. Additionally a novel digital concept is elaborated to enhance the readout electronics,to achieve further technical innovations of the complete sensor. The goal of this concept is to minimize noise and temperature drifts caused by the analog components of the readout electronics. This is feasible, because the main part is done digitally inside a DSP(digital signal processor).Measurement results of a prototype show a rms noise of 0,14 °/s and a non-linearity of 0,2% (end-point-straight-line) in a measurement range of +- 200 °/s. This paper also reports about a new high resolution gyroscope using large excitation oscillation amplitudes to achieve large Coriolis force. The goal of this concept is to reach a higher resolution compared to the state of the art vibratory micro-machined gyroscope.