Direct Photo-Imprinting in High Photosensitive Organically Modified Germanosilicate (ORMOGSIL) Glasses

摘要

Direct photo-imprinting of both surface relief pattern and refractive index modulation upon the organically modified germanosilicate (ORMOGSIL) glass using its large volume change was performed by ultraviolet exposure. A large refractive index increase up to 10~(-2) is induced by ultraviolet-induced densification in the ORMOGSIL glasses. The photosensitivity in the ORMOGSIL glass was enhanced by introducing a photo-polymerizable methcrylate group in the glass structure. Also, a surface AFM scans and optical microscope images of unetched sample show that the volume compaction in the ultraviolet illuminated region is associated with periodic pattern inscription.