WAFER-SCALE, SOLID FREEFORM FABRICATION OF FULLY-ASSEMBLED METAL MICRO-MECHANISMS FOR MINIMALLY-INVASIVE MEDICAL DEVICES

摘要

The EFAB process was first presented at the SFF Symposium in 1998, at a very early stage of its development. Currently, the technology is able to produce complex 3-D devices-including mechanisms built pre-assembled-in production volumes, using a three-step process of selective electrodeposition of one metal, blanket electrodeposition of another metal, and planarization. Layer thickness is as small as 4 μm, minimum feature size is down to 10 μm, and linear tolerances are ～2 μm. Metals are biocompatible materials with mechanical properties similar to stainless steel. The technology enables new instruments for minimally-invasive surgical and interventional procedures.