Rotary ITO Targets for Displays

摘要

Rotary ITO targets have the potential to substantially lower LCD production costs.The unique combination of high optical transmittance and low electrical resistance makes Indium Tin Oxide (ITO) the most widely used material for the construction of optoelectronic devices such as Liquid Crystal Displays (LCD). A highly degenerated wide gap semiconductor, ITO is capable of acting as transparent electric director for liquid crystals. Specifications for ITO layers encompass uniformity, low particle count over a large area, rapid and residual-free etchability, and tailored surface morphology. While each component in LCD technology is driven by a unique thin film architecture, ITO must fulfill different requirements in order to achieve optimal functional performance.