Nanoaquarium: integrated microchips fabricated by ultrafast laser for understanding phenomena and functions of microorganisms

摘要

We demonstrate to fabricate microfluidic chips integrated with some functional microcomponents such as optical attenuators and optical waveguides by femtosecond laser direct writing for understanding phenomena and functions of microorganisms. Femtosecond laser irradiation followed by annealing and wet etching in dilute hydrofluoric acid solution resulted in fabrication of three-dimensional microfludic structures embedded in a photosensitive glass. The embedded microfludic structures enabled us to easily and efficiently observe Phormidium gliding to the seedling root, which accelerates growth of the vegetable. In addition, integration of optical attenuators and optical waveguides into the microfluidic structures clarified the mechanism of the gliding movement of Phormidium. We termed such integrated microchips nanoaquariums, realizing the highly efficient and functional observation and analysis of various microorganisms.