Electroluminescent SrS Thin Films Grown by ALE

摘要

Atomic Layer Epitaxy (ALE) was originally developed by Suntola et al. [1] for making TFEL devices and in fabrication of monochrome displays ALE has succesfully been used for almost two decades. ALE or Atomic Layer Deposition (ALD) as it is at the moment more commonly called, has been used in the growth of alkaline earth sulfide films since mid 80s. At the beginning the focus was in CaS:Tb, CaS:Eu and SrS:Tb but soon it was realized that blue phosphor was the key issue in the development of full color TFEL devices. That time the most promising blue phosphor was SrS:Ce and it became also the focus of the ALE color EL research.