An application of entity-relationship data modeling techniques tothe automated manufacturing process

摘要

An entity-relationship (E-R) model has been developed tongenerically represent aspects of process information flow in anhierarchical automated manufacturing facility. The facility is expectednto be networked and to consist of a global controller, localncontrollers, etc. and IC processing equipment, organized in anhierarchical fashion. The development of the model is presented throughna case study of an automated semiconductor manufacturing facility. Inndeveloping the model, subschemas are first developed for the variousncomponent modules in the facility. The modules are then incorporatednusing a form of E-R model clustering and integration techniques into anschema for the entire facility. The generic structural properties of thenschema are clearly evident. The development and application of E-Rnconstructs to model time sequencing and ordering aspects of processninformation flow in the facility are potential areas of future research