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Nanometer germanium photodetector with aluminum surface plasmon antenna for enhanced photo-response

机译:带有铝表面等离子体激元天线的纳米锗光电探测器,可增强光响应

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摘要

We present theoretical design process for plasmon-enhanced photodetectors with nanometer-scale germanium area. The nontraditional plasmonic metal aluminum is employed as the material of surface plasmon antenna instead of noble metals owing to its integration compatibility with existing silicon complementary metal-oxide-semiconductor technology. The electrode/antenna is patterned with shallow concentric grating surrounding a subwavelength aperture (bull's eye structure) for concentrating and guiding strong optical intensity into an ultra-small active area. The physical modeling and geometric parameters optimization are performed based on the finite-difference time-domain method. Due to the excitation of fundamental or 2nd-order Bloch surface plasmon polaritons, high absorption can be obtained at near-infrared wavelengths of 1310 and 800 nm.
机译:我们介绍了具有纳米级锗面积的等离子体增强光电探测器的理论设计过程。非传统等离激元金属铝由于与现有的硅互补金属氧化物半导体技术具有集成兼容性而被用作表面等离激元天线的材料,而不是贵金属。电极/天线由围绕亚波长孔径(牛眼结构)的浅同心光栅构图,以将强光强度集中并引导到超小有源区域中。物理建模和几何参数优化是基于有限差分时域方法进行的。由于基波或二阶Bloch表面等离激元极化子的激发,可以在1310和800 nm的近红外波长获得高吸收。

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