A MEMS vibration sensor based on Mach Zehnder Interferometers

摘要

Two micro-optomechanical accelerometers based on Multi-Mode Interference (MMI) couplers were designed and evaluated in this study. The optical components were optimized with the Parameter Scan Method. According to the photoelastic effect, the change in refractive index of a waveguide made of crystal materials is related to the mechanical strains in the waveguide. In this study, such change was calculated using the mechanical strains obtained from the Finite Element Analysis (FEA) results. Beam Propagation Method (BPM) was used to study the relationship between the input acceleration and the output optical power and thus the performance of the proposed accelerometers. The results show the two designs are suitable for different acceleration ranges.