Intrapixel response test system for multispectral characterization

摘要

Abstract: We report on the design of a system used to measure the multispectral intrapixel response of imaging sensor arrays. An Airy disk spot size of approximately 4 $mu@m has been achieved for wavelength bands that extend from the visible blue to near IR. The automated system does rapid intrapixel row and/or column spatial mapping of individual pixels as well as rastered 2D spatial scans over multi-pixel girds. Commercially available equipment including a photometric eyepiece, a reflective objects, programmable pushers, and light-emitting diodes are utilized in the system. Scanned results using the system are presented for both front- and back-illuminating charge-coupled device imagers. The intrapixel response of a front-illuminated device shows good correlation with the physical cross section of the devices tested. !3