High Frequency Surface Acoustic Wave Devices Based On Multilayered LiNbO_3/Diamond/AlN Substrates: A Finite Element Study

摘要

We have used 3-D coupled field structural finite element models to study the acoustic wave propagation characteristics of diamond/AlN/LiNbO_3 multi-layered piezoelectric surface acoustic wave devices for applications in chemical and biological sensing. These devices were studied as a method to increase device frequency and sensitivity, and maintain standard fabrication procedures. Although recent experimental investigations have realized GHz frequency devices based on such multilayered substrates, very little is known about the acoustic wave propagation characteristics in these devices. Identifying the optimum configuration and thickness of the various layers involved still represents a challenge which is addressed in this work.