AVAILABILITY OF ENVIRONMENTAL, HEALTH SAFETY DATA FOR NOVEL SEMICONDUCTOR CHEMICALS METHODS TO GATHER DATA

摘要

As the semiconductor industry advances into new technology areas, a number of new and unique chemistries are being introduced. To sustain ongoing business, the industry must continue to ensure that new chemistries selected for research and development through manufacturing do not pose undo risk to human health and the environment. To help assess the risks, the chemicals must undergo a thorough risk assessment. To help the risk assessment process, the semiconductor industry has taken steps over the past few years to determine the types of Environmental, Health & Safety (ESH) Data they would like to see provided by chemical suppliers. This paper will discuss the opportunities to acquire additional ESH data and the gaps.