NANO-SCALE SURFACE REPLICATION BY POLYMER LAYERS: SPM AND X-RAY INVESTIGATIONS

摘要

We report results of nano-scale surface replication by thin polymer layers. The surfaces of deeply polished Si plates were used as etalon surfaces for the replication. AFM investigations showed that polymer layers replicate the surface of etalon samples fairly well. The X-ray reflectivity measurements showed that the half-width and peak values of the spectral dependences for X-ray mirrors grown on combined glass-polymer substrates practically coincided with those for mirrors on Si etalon substrates.