Abstract: Several standard and measures laboratories are using typical Koester interferometers (KI) and routine measurement procedures for evaluating the practical length of block gauges. In the paper the modification of KI by introducing laser light source and phase shifting element for automatization of interferogram analysis by temporal phase shifting method are presented. From phase data obtained the flatness, parallelism and length deviation of gauge block are automatically determined. The methodology and software procedures for this process are introduced and the examples of measurement are shown. !11
展开▼