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Modification of the Koster interferometer for automatization of gauge block measurements

机译:修改Koster干涉仪以实现量块自动测量

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Abstract: Several standard and measures laboratories are using typical Koester interferometers (KI) and routine measurement procedures for evaluating the practical length of block gauges. In the paper the modification of KI by introducing laser light source and phase shifting element for automatization of interferogram analysis by temporal phase shifting method are presented. From phase data obtained the flatness, parallelism and length deviation of gauge block are automatically determined. The methodology and software procedures for this process are introduced and the examples of measurement are shown. !11
机译:摘要:一些标准和测量实验室正在使用典型的科斯特干涉仪(KI)和常规测量程序来评估块规的实用长度。本文介绍了通过引入激光光源和相移元件对KI进行的修改,以通过时间相移方法自动进行干涉图分析。根据获得的相位数据,可以自动确定量规块的平面度,平行度和长度偏差。介绍了此过程的方法和软件过程,并显示了测量示例。 !11

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