Interband Cascade Lasers with High CW Power and Brightness

摘要

We report corrugated narrow-ridge interband cascade lasers emitting at λ ≈ 3.5 μm that have been fabricated using CH_4/Cl_2- and BCl_3-based inductively coupled plasma reactive ion etch processes, with largely similar results from both types of etches. The highest brightness figure of merit was obtained at intermediate ridge width (28 μm), for which the maximum cw output power at T = 25 ℃ was 522 mW and the corresponding wallplug efficiency and beam quality factor were 10.3% and M~2 = 3.1, respectively. The high output power may be attributed to a 7-stage design that employs thicker separate confinement layers for lower internal loss.