MDSC of microelectronics materials

摘要

MDSC has been used to study the thermal properties of several classes of materials important in microelectronics. Microporous materials with low dielectric constant may be formed by copolymerizatin of a thermally decomposing, mutually insoluble polymer with the dielectric polymer. Such material show the separate T_g's characteristic of phase separated materials. The low temperature region often has a curving Cp vs. temperature curve that causes difficulty in defining the T_g range and temperature. Measurement of the temperature dependence of the Cp constant over the entire temperature range often improves the shape of the curves, leading to simpler interpretation.