INTERFEROMETRIC CONTROLLED PLANAR NANOPOSITIONING SYSTEM WITH 100 MM CIRCULAR TRAVEL RANGE

摘要

The rapid pace of development of the future technologies, like for example nanotechnology, optical high technology or microsystems technology, makes great demands on positioning systems used for inspection and analysis. Objects with dimensions of hundreds of millimeters have to be positioned and measured with precision in the range of nanometers. Within the collaborative research centre 622 ,,Nanopositioning and nanomeasuring machines" at the llmenau University Of Technology [1], scientists are working on providing the scientific basis for the necessary nanotechnological equipment. As a part of this project the authors are researching the basics of designing nanopositioning systems for large travel ranges in x and y of hundreds of millimeters.