A STUDY OF INFLUENCE OF LONG-PERIOD GROUND MOTION ON SEMICONDUCTOR INDUSTRY

摘要

Huge earthquake causes a long-period ground motion, and it transfer to very far away, almost all over the world. This ground motion doesn't destroy the machine but causes the servo error.This motion has long sysle, therefore it decreases the utilization rates of the machine. We must establish countermeasure to long-period ground motion because it cause a lot of economic damage to semiconductor industry in the future.