12 000 pixel monolithic CCD linear image sensor for high resolution instruments

摘要

Tigh quality electronic imaging systems are highly demanding in more and more resolution. The new linear image sensor develped by Thomson-CSF is made of 12,000 pixels.. It features on-chip anti-blooming function on each 6.5 #mu# m x 6.5 #mu# m square pixel, and is mounted in a Dual In Line ceramic package, specially designed for high flatness and mechanical stability. Main characteristics of this new high resolution CCD linear image sensor are high output data rate up to 40 MHz, 80 dB large dynamic range, very low lag, as well as high electro-optical performances in photo-response uniformity, low dark current and noise. The paper details the CCD architecture, and reports on electro-optic, geometrical and mechanical performances.