Conversion of organic-inorganic polymers to ceramics by ion implantation

摘要

Thin films of polycarbosilane (PCS) and polysiloxane (SR350 resin0 deposited on Si substrates were irradiated with He, C, or Au ions in order to convert them into SiC and SiOC ceramic coatigns. The transformation kinetics was assessed by means of ion beam analysis (RBS, NRA, ERDA) and FTIR, while the hardening was measured by nanoindentation tests. The yield of H release increased exponentially with the amount of electronic excitations up to a saturation value, and correlated properties of compaction and hardness varied in proportion to this yield (SR 350) or to its square (PCS). PCS films became as hard as amorphous SiC and SR350 films 60