首页> 外文会议>Proceedings of the First Symposium on Advanced Photon Research November 8-9, 1999, Keihanna Plaza/Advanced Photon Research Center, Kyoto, Japan >Fabrication and Evaluation of Holographically Varied Line-Spacing Gratings for Soft-X-Ray Flat Field spectrographs
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Fabrication and Evaluation of Holographically Varied Line-Spacing Gratings for Soft-X-Ray Flat Field spectrographs

机译:软X射线平场光谱仪全息可变行距光栅的制作和评估

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Recent progress in the desing of aspheric wave-front recording systems has enabled the manufacture of holographic gratings with strongly varied groove densities suitable for soft X-ray flat field spectrographs. A holgraphic grating thus recorded was processed to produce a laminar profile by reactive ion-etching. Measurements are reported here of the absolute diffraction efficiency of this grating and of a comparable mechanically ruled grating using a synchrotron radiation. It is found that the holographic grating is effective at suppressing the higher orders. The spectral resoltuion was determined using a Carbon K#alpha# X-ray generator and a spectrograph with an imaging detector. the spectral resolution of the holographic grating was about three tiems worse than that of the ruled grating.
机译:非球面波前记录系统的设计方面的最新进展使得能够制造出沟槽密度变化很大的全息光栅,适用于软X射线平场光谱仪。如此记录的全息光栅通过反应性离子蚀刻被处理以产生层状轮廓。此处报道了该光栅以及使用同步加速器辐射的类似机械直纹光栅的绝对衍射效率的测量结果。发现全息光栅在抑制较高阶上是有效的。使用Carbon K#alpha#X射线发生器和带有成像检测器的光谱仪确定光谱分辨率。全息光栅的光谱分辨率比直纹光栅的光谱分辨率差大约三个领带。

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