Study on Micro WEDM Using Electrostatic Induction Feeding Method

摘要

In this research, the electrostatic induction feeding method was applied to WEDM. Since the method is able to eliminate the influence of stray capacitance in the pulse generator circuit, discharge energy can be minimized to accomplish micro-WEDM. This method also allows non-contact feeding of electric current to the wire electrode, realizing highly accurate micro-WEDM because there is no wear of brush and the wire vibration does not depend on the cutting direction. This paper investigated the micromachining properties of WEDM using the electrostatic induction feeding method. Then the influence of the pulse frequency on fabrication of micro beams by this method was investigated. Finally, attempts were made to apply electrostatic induction feeding WEDM to the fabrication of micro-electrode array successfully.