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Lithographic aerial image simulation with FPGA-based hardwareacceleration

机译:基于FPGA硬件加速的光刻航拍图像仿真

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Lithography simulation, as an essential step in design for manufacturability (DFM), is still far from computationally efficient. Most leading companies use large clusters of server computers to achieve acceptable turn-around time. Thus co-processor acceleration is very attractive for obtaining increased computational performance with reduced power consumption. This paper describes an implementation of a customized accelerator on FPGA using a polygon-based simulation model. An application-specific memory partitioning scheme is designed to meet the bandwidth requirements for a large number of processing elements. Deep loop pipelining and ping-pong buffer based function block pipelining are also implemented in our design. Initial results show a 15X speedup versus the software implementation running on a microprocessor, and more speedup is expected via further performance tuning. The implementation also leverages state-of-art C-to-RTL synthesis tools. At the same time, we also identified the need for manual architecture-level exploration for parallel implementations>>> af++ DE102005009536A1 . 2006-08-31

机译:检查掩模上的弱点的过程使用航拍图像仿真来生成关键点或热点列表,然后使用航拍成像测量系统对其进行分析,以将真实图像与模拟图像进行比较

  • 机译:光刻设备,其配置为重建航迹并将比较后的航迹与图像传感器检测到的航迹进行比较

  • 机译:用于航空影像计量系统的放大成像镜头,例如用于制造半导体元件的光刻掩模的特性影响的模拟,图像平面代表透镜场平面

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