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Simultaneous two-dimensional nanometric-scale position monitoring by probing a two-dimensional photonic crystal plate

机译:通过探测二维光子晶体板同时进行二维纳米级位置监控

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摘要

Simultaneous two-dimensional nanometric-scale position monitoring can be achieved in a simple interferometric setup by real-time probing a hexagonal photonic crystal glass substrate. The minimum detectable translational movement is determined by the period of photonic crystal array, and can be as high as 8 nm in the present work.
机译:通过实时探测六角形光子晶体玻璃基板,可以在简单的干涉仪设置中实现同时的二维纳米级位置监控。最小可检测的平移运动由光子晶体阵列的周期决定,在当前工作中可以高达8 nm。

著录项

  • 来源
  • 会议地点 San Francisco CA(US)
  • 作者单位

    Department of Optics and Photonics, National Central University, 320 Jhung-Li, Taiwan;

    rnDepartment of Optics and Photonics, National Central University, 320 Jhung-Li, Taiwan;

    rnDepartment of Optics and Photonics, National Central University, 320 Jhung-Li, Taiwan;

    rnDepartment of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, 300 Hsinchu, Taiwan;

    rnDepartment of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, 300 Hsinchu, Taiwan;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 TB342;
  • 关键词

    times roman; image area; acronyms; references;

    机译:时代罗马图像区域首字母缩写词参考资料;

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