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Optical information recording based on photochemical etching of aluminum films

机译:基于铝膜光化学刻蚀的光学信息记录

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Abstract: The publication describes optical information recording process based on the photochemical etching of the aluminum films using sandwich-type structures: substrate/aluminum film/polymer light-sensitive layer. The etchers are produced during the illumination of the light-sensitive polymer layers. Processes of the etching have a high light- sensitivity due to additional post-exposure autocatalytic accumulation of the etchers.!8
机译:摘要:该出版物描述了基于光化学刻蚀的光学信息记录过程,该过程是使用夹心型结构对铝膜进行光化学刻蚀:基板/铝膜/聚合物感光层。蚀刻剂在光敏聚合物层的照射期间产生。由于蚀刻剂的额外曝光后自催化积累,蚀刻工艺具有很高的光敏性!8

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