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GROWTH AND ION EROSION: TWO METHODS FOR PATTERNING SURFACES

机译:生长和离子侵蚀:两种表面绘制方法

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In metal surfaces a build-up of a regular pattern during ion sputtering is produced by two different mechanisms that produce a similar surface instability: the surface curvature dependence of the sputtering yield and the presence of an extra energy barrier whenever diffusing adatoms try to descend step edges. By tuning the competition between erosion- and diffusion-induced surface re-organization, it is possible to investigate new phenomena like the rotation of ripple orientation on an anisotropic fcc(110) substrate and the pattering of a fcc(001) substrate from a mound-like to a ripple structure. Similar phenomena occur in the case of homoepitax-ial growth. In the multilayer regime [Ag on Ag(110)] the rotation of a ripple-like pattern was observed with changing surface temperature. The phenomenon is related to the peculiar hierarchy of inter- and intra-layer diffusion barriers present on the anisotropic Ag(110) substrate. Homoepi-taxial growth on Ag(001) in the multilayer regime is studied with STM. The height, lateral distance, and order of the mound-like structures change with the deposition temperature. The surface morphologies obtained after sputtering and homoepitaxial deposition of Ag(001) have strong similarities. The general approach considers sputtering as the negative of homoepitaxial deposition, i.e. as a deposition of vacancies which can eventually have an asymmetry in their diffusivities. This paper shows that this picture is oversimplified because the dominant effect of ion sputtering is the formation of clusters of adatoms and vacancies.
机译:在金属表面上,通过两种产生相似表面不稳定性的不同机制,在离子溅射过程中形成了规则的图形:溅射产量的表面曲率依赖性以及每当扩散原子试图下降时都会存在额外的能垒。边缘。通过调整腐蚀和扩散引起的表面重组之间的竞争,可以研究新的现象,例如各向异性fcc(110)基板上波纹方向的旋转以及fcc(001)基板从土堆上的图案化-像波纹结构。在同位外延生长的情况下也会发生类似的现象。在多层状态[Ag(110)上的Ag]中,随着表面温度的变化观察到波纹状图案的旋转。该现象与各向异性Ag(110)衬底上存在的层间和层内扩散势垒的特殊层次有关。用STM研究了多层法中Ag(001)上的同质外延生长。丘状结构的高度,横向距离和顺序随沉积温度而变化。溅射和同质外延沉积Ag(001)后获得的表面形貌具有很强的相似性。一般的方法认为溅射是同质外延沉积的负,即认为是空位的沉积,其最终可能在扩散方面具有不对称性。本文表明,由于离子溅射的主要作用是形成原子团和空位簇,因此该图被简化了。

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