Optical films with nanometer structures

摘要

Two kinds of films with nanometer structure, Sb-type super-resolution near-field structure (Sb-SR) and random Sb-SiN film were studied in this paper. Sb-SR is the sandwich structure SiN(20nm)/Sb(15nm)/SiN(20nm). Experimental results show that the super-resolution performance of amorphous Sb-SR is considerably better than crystal Sb-SR. Considering that Sb is a semiconductor with small energy gap, a three-order nonlinear response of surface plasmons is deduced to explain the performance of amorphous Sb-SR. Estimation is made and the calculated results are in agreement with the experimental results. Random Sb-SiN film is the film in which Sb nano-particles are randomly dispersed. Results show that the random Sb-SiN films possess high transmittance and low reflectivity. When the random Sb-SiN film was prepared close to a phase-change-recording layer, it decreases the threshold of input power for recording and speeds up the phase transition of recording media.