首页> 外文会议>Nanotechnology III; Proceedings of SPIE-The International Society for Optical Engineering; vol.6591 >Defects density and carrier lifetime in nitrogen-doped ultrananocrystalline and polycrystalline diamond films
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Defects density and carrier lifetime in nitrogen-doped ultrananocrystalline and polycrystalline diamond films

机译:掺杂氮的超纳米晶和多晶金刚石薄膜的密度和载流子寿命缺陷

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The electrical activity of nitrogen related defects are investigated in ultra-nanocrystalline diamond (UNCD) films achieved using different N_2% in the gas phase by transient photocurrent technique at λ = 193 nm, and by steady state photocurrent measurements in the photon energy range 1-6 eV. In undoped UNCD films, spectrally resolved photocurrent measurements reveal a threshold at about 1 eV, related to the absorption of non diamond carbon phases, followed by a monotonic increase by more than one order of magnitude up to about the diamond energy gap, where a steep rise occurs due to band to band transitions. In nitrogen doped UNCD films a clear onset of the spectral photocurrent signal is hardly detectable, although an apparent shifttowards higher energies is evidenced, in agreement with a possible nitrogen induced Fermi level shift upward in the band gap. The main N-related feature of the spectra is however a sharp peak at about 4 eV, which is also observed in polycrystalline diamond films grown in a nitrogen rich gas mixture, particularly close to the boundary of the deposition area. On the other hand, photocurrent pulse shape analysis gives carrier lifetime values in the 6-10 ns range, almost independent of nitrogen content. Instead, N-related defects appear mainly responsible for trapping processes, which slow down carrier transport and give rise to long transit times. Such results are discussed in terms of photoionization of N-related defects formed in the non diamond carbon phase.
机译:通过使用λ= 193 nm的瞬态光电流技术,并通过在光子能量范围为1的稳态光电流测量,研究了在气相中使用不同N_2%的超纳米晶金刚石(UNCD)膜中氮相关缺陷的电活动。 6 eV。在未掺杂的UNCD膜中,通过光谱分辨的光电流测量可知,阈值约为1 eV,与非金刚石碳相的吸收有关,然后单调增加一个以上数量级,直至达到大约金刚石能隙。上升是由于频带间的转换引起的。在氮气中掺杂的UNCD薄膜中,几乎没有检测到光谱光电流信号的清晰开始,尽管已证明明显地向更高的能量偏移,这与可能的氮引起的费米能级在带隙中向上移动是一致的。然而,光谱的主要与N相关的特征是在约4 eV处出现一个尖峰,这在富氮气体混合物中生长的多晶金刚石薄膜中也观察到,特别是靠近沉积区域的边界。另一方面,光电流脉冲形状分析给出的载流子寿命值在6-10 ns范围内,几乎与氮含量无关。取而代之的是,与N相关的缺陷似乎主要与捕获过程有关,捕获过程减慢了载流子的传输速度,并延长了运输时间。就在非金刚石碳相中形成的N相关缺陷的光电离而言,讨论了此类结果。

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