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Formation of polymer thin films and interface control by physical vapor deposition

机译:聚合物薄膜的形成和通过物理气相沉积的界面控制

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Some strategies of physical vapor deposition (PVD) of polymer thin films have been proposed. Direct vapor deposition can be applied for simple polymers like polyethylene and Teflon. Coevaporation of bifunctional monomers can be achieved to deposit polyimide, polyurea etc., while chain polymerization assisted by ultraviolet or electron irradiation can be used to form vinyl or acryl polymers from single evaporation source. Surface-initiated deposition polymerization, which combines the self-assembled monolayer and vapor deposition, is another unique method to grow polymer thin films that are chemically bound to the substrate surface. The last method is also effective in controlling the interface between polymer films and inorganic substrates. The solvent-free nature of PVD is convenient for the formation of nanometer-thick films and especially multilayers that are required for device fabrication. Application of vapor deposition polymerization for fabrication of organic light-emitting diode is also described.
机译:已经提出了聚合物薄膜的物理气相沉积(PVD)的一些策略。直接气相沉积可用于简单的聚合物,例如聚乙烯和特氟隆。可以实现双功能单体的共蒸发以沉积聚酰亚胺,聚脲等,而借助紫外线或电子辐照辅助的链聚合可用于从单一蒸发源形成乙烯基或丙烯酸类聚合物。将自组装单层和气相沉积相结合的表面引发的沉积聚合是另一种独特的方法,可以使化学键合到基材表面的聚合物薄膜生长。最后一种方法在控制聚合物膜和无机基材之间的界面上也是有效的。 PVD的无溶剂性质便于形成纳米厚度的薄膜,尤其是器件制造所需的多层薄膜。还描述了气相沉积聚合在制造有机发光二极管中的应用。

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