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Grating reflectors for erbium-doped lithium niobate waveguide lasers

机译:掺er铌酸锂波导激光器的光栅反射器

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摘要

Abstract: A grating fabrication technology has been established for producing DFB- /DBR-grating structures in Er-doped Ti:LiNbO$-3$/ waveguide lasers. It is based on holographically defined resist gratings transferred into the surface of LiNbO$-3$/ waveguides using reactive ion etching with SF$-6$/ gas as the dry etching technique. For a sample with a 24 mm long surface relief grating of 346 nm period, a transmission drop of $MIN@11.7 dB, a filter bandwidth as small as 0.08 nm, a Bragg resonance wavelength at 1528.4 nm very close to the Erbium absorption line at 1531 nm and excess losses attributed to the grating of only 1 to 2 dB were measured. !22
机译:摘要:已经建立了一种光栅制造技术,用于在掺Er Ti:LiNbO $ -3 $ /波导激光器中生产DFB- / DBR光栅结构。它基于全息定义的抗蚀剂光栅,该光栅通过使用SF $ -6 $ /气体的反应离子蚀刻作为干法蚀刻技术转移到LiNbO $ -3 $ /波导表面。对于具有346 nm周期的24 mm长表面起伏光栅的样品,透射率下降MIN@11.7 dB,滤波器带宽小至0.08 nm,布拉格共振波长为1528.4 nm,非常接近于at吸收线测量了1531 nm,归因于光栅的额外损耗仅为1-2 dB。 !22

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