Evaluation of reflectors for soft x-ray optics

摘要

Abstract: It is necessary to characterize surface roughness in order to clarify the relation between reflectivity and roughness. A comparison between characterized roughness of direct measurement of surface and calculated roughness from measured reflectivity is made. Surface roughness was improved using the dual ion beam sputtering method as a parameter of assisting ion energy. As a result, those two roughnesses showed good agreement and the surface roughness becomes minimum at assisting ion energy of 50 eV. !6