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Fabrication and analysis of Mo-Si multilayers

机译:Mo-Si多层膜的制备与分析

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Abstract: Molybdenum-Silicon (Mo-Si) multilayers have been fabricated in our laboratory for reflecting various soft x-ray wavelengths. Several normal incidence mirrors have been produced for a solar sounding rocket flight. Using properly shaped masks on 3 in. diameter dc magnetrons, we can produce multilayers of a similar size having a uniformity of better than $POM@3% over their entire surface area. Peak reflectance of the multilayers are as high as 42% at 171 angstroms. Efforts are underway to deposit several layers of different period on top of the multilayers in order to attenuate the reflection of 304 angstroms, a very bright line of He II in the solar spectrum. In the interim, we have made a Mo-Si mirror that reflects at 304 angstroms. In addition to obtaining information on the solar corona at this wavelength, this will greatly reduce the effects of the He II line when its image is appropriately subtracted from others. These results and a discussion of the current status of our multilayer research is presented. !3
机译:摘要:在我们的实验室中已经制作了钼硅(Mo-Si)多层膜,用于反射各种软X射线波长。已经为太阳探测火箭飞行生产了几个垂直入射镜。在直径为3英寸的直流磁控管上使用适当形状的掩模,我们可以生产出类似大小的多层,其整个表面积的均匀性优于$ POM @ 3%。多层的峰值反射率在171埃时高达42%。正在努力在多层的顶部沉积几层不同周期的层,以减弱304埃的反射,这是太阳光谱中He II的非常亮的线。在此期间,我们制作了可反射304埃的Mo-Si镜。除了获得有关该波长的日冕的信息外,当从其他图像中适当减去He II线的图像时,这将大大降低He II线的影响。提出了这些结果并讨论了我们多层研究的现状。 !3

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