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Nickel Salt Effect on Macroporous Silicon Immersed in Fluoride Solution: From Silicon Microtubes to Nickel Microtubes

机译:镍盐对浸入氟化物溶液中的大孔硅的影响:从硅微管到镍微管

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摘要

The porous silicon is a suitable material for different applications in the different technological fields such as sensor devices (1,2) and photonic devices (1-3), Its versatility for many photonic device fabrications is due to its interesting physical and chemical properties which could be tunned just by controlling the electrochemical parameters in the anodization process used for porous silicon formation (1,3). On the other hand, the micro and nano-metallic structure has achieved the great interest in the scientific community because this one showed to have a broad new possible applications like as nanocomposites system (4,5), and photonic crystal devices (6). For this reason, several researchers have devoted many efforts for the development of new techniques and process in order to fabricate metallic micro and nano structures and one of these methods used the template substrate for molding the metallic nano structure features (4-11).
机译:多孔硅是适合不同技术领域中不同应用的合适材料,例如传感器设备(1,2)和光子设备(1-3)。它在许多光子设备制造中的多功能性是由于其有趣的物理和化学特性,可以通过控制用于多孔硅形成的阳极氧化工艺中的电化学参数来调节(1,3)。另一方面,微和纳米金属结构引起了科学界的极大兴趣,因为这种结构显示出了广泛的新的可能应用,例如纳米复合材料系统(4,5)和光子晶体器件(6)。由于这个原因,一些研究人员投入了很多精力来开发新的技术和工艺,以制造金属的微米和纳米结构,其中一种方法是使用模板基板模制金属的纳米结构特征(4-11)。

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  • 来源
  • 会议地点 Sao Paulo(BR);Sao Paulo(BR)
  • 作者单位

    Microeletronic Laboratory, University of Sao Paulo, Sao Paulo - SP, Brazil;

    rn Signal Processing Laboratory, University of Sao Paulo, S2o Paulo- SP, Brazil;

    rnScannin Electron Microscopy Laboratory, University of Sao Paulo, S3o Paulo - SP,Brazil;

    Microeletronic Laboratory, University of Sao Paulo, Sao Paulo - SP, Brazil;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 半导体技术;
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