Film Bulk Acoustic Wave Resonator for Trace Chemical Warfare Agents Simulants Detection in Micro Chromatography

摘要

This paper reported the polymer coated film bulk acoustic resonators (FBAR) as a sensitive detector in micro chromatography for the detection of trace chemical warfare agents (CWA) simulants. The FBAR sensor was enclosed in a microfluidic channel and then coupled with microfabricated separation column. The subsequent chromatographic analysis successfully demonstrated the detection of parts per billion (ppb) concentrations of chemical warfare agents (CWAs) simulants in a five components gas mixture. This work represented an important step toward the realization of FBAR based handheld micro chromatography for CWA detection in the field.