New Multilayer Coating for 30.4 nm radiation

摘要

A multilayer coating of Mo/Si is usually used as an EUV optics for space science, especially for He-II (30.4nm) radiation, because it is highly stable under vacuum and atmosphere. The fairly high reflectivity of 15-20% was achieved. But space science community will need higher reflective coating at 30.4 nm radiation for the future satellite missions. In this work, for developing new multilayer mirror of He-II radiation, we report the design of a multilayer, consisting of a pair of Mg and SiC, and its fabrication, and result of the reflectance with the monthly degradation under the atmosphere circumstance.