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35 Drive Current Improvement from Recessed-SiGe Drain Extensions on 37 nm Gate Length PMOS

机译：35％在37 nm栅极长度PMOS上从凹陷 - SiGe排水延伸发生电流改善

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Results from the best reported PMOS transistor at a 37 nm gate length (Lg) built on a process with a recessed SiGe epitaxial layer are discussed. The process details include successful integration of SiGe at the drain extension (DE) location. A highly compressive SiGe layer, in close proximity to the channel, results in large hole mobility improvements. HRTEM based lattice parameter extractions confirm the compressive strain in the channel. In situ doped B in SiGe can be activated to a higher degree than implanted B in bulk Si resulting in further improvements from the lower DE resistance. Both changes combine to give an unprecedented 35% PMOS performance improvement. Process and device simulations that predict the observed parametric behavior quantitatively isolate the improvements to be ～ 28% from stress and 7% from DE resistance improvement.

机译：讨论了由基于凹陷SiGe外延层的过程的37nm栅极长度（LG）的最佳报告的PMOS晶体管的结果。过程细节包括在排水延长（DE）位置的SiGe成功集成。高度压缩的SiGe层，密切接近通道，导致大孔迁移率改进。基于HRTEM的晶格参数提取证实了通道中的压缩应变。在SiGE的原位掺杂B可以被激活到比植入B的植入B更高的程度，从而从较低的de电阻中进一步改进。这两种变化都结合起来给出前所未有的35％的PMOS绩效改进。预测观察到的参数行为的过程和设备模拟定量地将改进与应力的改善分离为约28％，并且从De抵抗改进的7％。

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《Symposium on VLSI Technology 》|2004年||共2页
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P. R. Chidambaram; B. A. Smith; L. H. Hall; H. Bu; S. Chakravarthi; Y. Kim; A. V. Samoilov; A. T. Kim; P. J. Jones; R. B. Irwin; M. J. Kim; A. L. P. Rotondaro; C. F. Machala; D. T. Grider;
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1. Enhanced Performance of P-FET Omega-Gate SoI Nanowire With Recessed-SiGe Source-Drain Down to 13-nm Gate Length [J] . Barraud, S., Coquand, IEEE Electron Device Letters . 2013 ,第9期

机译：具有低至13nm栅极长度的嵌入式SiGe源极漏极的P-FET Omega-Gate SoI纳米线的增强性能
2. A drain-current model for DG PMOSFETs with fabricated 35 nm device comparison [J] . Todd G. Mckenzie, Yiming Li International Journal of Computational Science and Engineering . 2006 ,第3a4期

机译：DG PMOSFET的漏极电流模型与制造的35 nm器件比较
3. Radiation-enhanced gate-induced-drain-leakage current in the 130 nm partially-depleted SOI pMOSFET [J] . Chao Peng, Zhiyuan Hu, Bingxu Ning, Solid-State Electronics . 2015 ,第apra期

机译：130 nm部分耗尽的SOI pMOSFET中的辐射增强型栅极感应的漏漏电流
4. 35 drive current improvement from recessed-SiGe drain extensions on 37 nm gate length PMOS [C] . Chidambaram, P.R., Smith, . 2004

机译：栅长为37 nm的PMOS上的凹陷SiGe漏极扩展区使驱动电流提高了35％
5. Gate-to-channel parasitic capacitance minimization and source-drain leakage evaluation in germanium PMOS. [D] . Krom, Raymond T., III. 2008

机译：锗PMOS中的栅极间寄生电容最小化和源极-漏极泄漏评估。
6. Integration of Highly Strained SiGe in Source and Drain with HK and MG for 22 nm Bulk PMOS Transistors [O] . Guilei Wang, Jun Luo, Changliang Qin, 2017

机译：用于22nm体PMOS晶体管的HK和MG集成了源极和漏极中的高应变SiGe
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8. Examination of Temperature Effects on Gate-to-Drain Avalanche Breakdown in GaAs MESFETs (Metal-Semiconductor Field Effect Transistors) by Measuring Light Emission under RF Drive [R] . Robb, R. E. 1987

机译：通过测量射频驱动下的发光，检测温度对Gaas mEsFET（金属 - 半导体场效应晶体管）中栅极 - 漏极击穿击穿的影响

35 Drive Current Improvement from Recessed-SiGe Drain Extensions on 37 nm Gate Length PMOS

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