Abstract: Micromachining of hard materials such as fused silica and GaN by hybrid laser processing, in which interaction of the conventional pulsed laser beam and another medium on the material surface leads to effective ablation, is reviewed. Simultaneous irradiation of VUV and UV laser beams emitted from a VUV Raman laser presents great potential for precision microfabrication of the hard materials (VUV-UV multiwavelength excitation process). In addition, another hybrid laser processing of glass materials using a conventional UV or visible laser, referred to as `laser- induced plasma-assisted ablation', is introduced. The mechanisms and the advantages of each technique are discussed in comparison with the conventional single wavelength laser ablation.!18
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