Estimation of Rise Time and Frequency Spectra of Discharge Current Waveforms for Air Discharges of an ESD-Gun with Low Charge Voltages

摘要

The discharge current waveform for air discharges of an ESD-gun with low charge voltages onto a wideband current detector was measured for a bandwidth of 12 GHz. T_o grasp real rise time of the observed current waveform, input current waveform was estimated from the frequency response of the second order low pass filter of the oscilloscope, which showed that a minimum value of the estimated rise time is 17 ps. Frequency spectra of the estimated current waveforms are also compared with those of measured ones. As a result, for air discharges at several hundred volts, frequency spectra of estimated waveforms have the higher frequency components than measured ones above 2 GHz.