MAGNETIC AND ELASTOMERIC DAMPING EFFECTS ON THE VIBRATION AMPLITUDE OF A VIBRATION ISOLATION SYSTEM

摘要

This technical paper describes the design and experimental process for a single-stage multi-degree-of-freedom vibration isolation system for a scanning tunneling microscope. The mathematical model used for the mass-spring system analysis will be presented, along with various design iterations for the mass-spring system and the frame. Based on the mathematical model, a MATLAB script is developed to study hundreds of springs available online so that a spring that satisfies important specifications can be chosen. Finite Element software is used to investigate the natural frequencies of the frames, which will assist the frame's design selection. Throughout the design process, magnetic and elastomeric damping methods are actively considered to simplify the design due to tight constrain of the vacuum chamber.