Return and exit mechanism of troubleshooting based on auto-triggered method for TEM vacuum system

摘要

According to request of the vacuum system on the status of various failures on TEM, return and exit mechanisms based on auto-triggered method is designed for troubleshooting. By analyzing the failure modes and the response measurement, the emergency operation plan is determined, the fault handling process is planned, and the return and exit mechanism is established. By auto-triggered mode, the vacuum control system achieves automatic response to a variety of failure and reasonable handling so as to ensure the stable operation of TEM. Through the actual operation, the test results show that the return and exit mechanism of troubleshooting is effective, and the failure processing based on auto-triggered method satisfies the system requirements.