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Nanolithography of Metal Catalysts by Dip-Pen Nanolithography~TM

机译:浸渍纳米光刻〜TM金属催化剂的纳米光刻

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Nano-patterning of metals on gold film and silicon nitride membrane using Dip Pen Nanolithography (DPN~TM) is reported in this study. Using this technique, nano-particles can be delivered or nano-scale features of metals can be deposited precisely at specific locations using the unique registration capabilities of DPN. Monolayers of metal salts (FeCl_2, FeCl_3, PdCl_2, etc.) are deposited with nano-scale precision using DPN. These metal salts can be subsequently reduced to pure metals in a reducing environment for various applications (e.g., magnetic memory storage, nano-catalysis, molecular electronics, brand protection, nano-sensors, etc.). Square nano-patterns of Palladium and Iron salts were successfully deposited using this technique with thickness of the deposited materials being less than 1 nm.
机译:本研究报道了使用DIP PEN纳米线(DPN〜TM)的金膜和氮化硅膜上的金属纳米图案化。 使用该技术,可以递送纳米颗粒或者可以使用DPN的独特登记能力在特定位置精确地沉积金属的纳米级特征。 金属盐(FECL_2,FECL_3,PDCL_2等)的单层使用DPN沉积纳米级精度。 随后可以将这些金属盐降低到还原环境中的纯金属,用于各种应用(例如,磁记忆储存,纳米催化,分子电子,品牌保护,纳米传感器等)。 使用该技术成功沉积钯纳米型和铁盐的方形纳米图案,该技术具有小于1nm的沉积材料的厚度。

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