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First investigations of Au/Sn alloys on different end-metallizations

机译:第一次研究不同末端金属化上的AU / SN合金

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摘要

Au/Sn solder is constantly becoming more important in the field of microelectronic packaging. Especially for high temperature and fluxless applications, for example in optoelectronics Au/Sn solder bumps are used. The Au/Sn solders come in contact with different end-metallization systems such as nickel, platinum or palladium used as pad-metallization. Information about the ternary systems Au-Ni-Sn, Au-Pd-Sn and Au-Pt-Sn as a metallurgical fundamentals are very important for understanding and controlling the technological processes. This knowledge is the base for investigations on reliability, phase formations, growth and stability, diffusion mechanisms and diffusion path ways. This paper summarizes the work done on different Au-Ni-Sn-, Au-Pd-Sn- and Au-Pt-Sn alloys with maximum 20 at.-% Ni, Pd and Pt contents and investigations on diffusion and interface reactions of Au/Sn solders on Ni, Pd and Pt. Isothermal sections of the solid state are introduced The presence of unknown Au-Ni-Sn- and Au-Pd-Sn-phases in the tie-triangle is discussed Results of diffusion investigations and interface reactions are shown.
机译:在微电子包装领域,Au / Sn焊料在经常变得更加重要。特别是对于高温和无芯的应用,例如在光电子中使用Au / Sn焊料凸块。 AU / Sn焊料与不同的最终金属化系统(如镍,铂或钯)接触,用作垫金属化。有关Ternary Systems Au-Ni-Sn,Au-PD-Sn和Au-Pt-Sn作为冶金基本面的信息对于理解和控制技术过程非常重要。这种知识是对可靠性,相位形成,生长和稳定性,扩散机制和扩散路径方式的研究的基础。本文总结了在不同的Au-Ni-Sn-,Au-Pd-Sn和Au-Pt-Sn合金上完成的工作,最大20.-%Ni,Pd和Pt含量和Au扩散和界面反应的研究/ sn焊料在ni,pd和pt上。探讨了连带三角形中未知的Au-Ni-Sn-和Au-Pd-Sn相的存在的等温部分被讨论扩散研究的结果和界面反应。

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