Miniature Machine Tools and Modeling Studies on Process in Micromachining of Microcomponents

摘要

Currently, the development of micromachine tool has been promoted by the rapid growth in the fabrication of microcomponents. The advantage of miniature/micro machine tool over microelectromechanical systems (MEMS) and conventional largescale ultraprecision machine tool is the ability to produce microparts, composed of various nonsilicon materials, with 3D complex shapes or free-form surface, and meanwhile consume little energy, space and resources. In this paper, the design and applications of micromachine tools, developed in Japan, America, Korea and UK, are presented. Especially, two micromachine tools (300 mm × 150 mm × 165 mm and 300 mm × 300 mm × 290 mm, respectively) constructed in Harbin Institute of Technology are introduced. The other focus in this paper is on the review of recent modeling studies of micromachining process, which include finite element analysis at microscale, molecular dynamics simulation and multiscale simulation. The trends on micromachine tool and modeling methods of process are also pointed out.