On the technological approach to microfabrication of a meander-line slow-wave structure for millimeter-band traveling-wave tubes with multiple sheet electron beams

摘要

Millimeter-band traveling-wave tubes with multiple electron beams have attracted an increasing interest thanks to higher output power. In this work, we report the results of the development of the technological approach to microfabrication of a meander-line slow-wave structure for millimeter-band traveling-wave tubes with multiple sheet electron beams. We used a precision CNC laser machine equipped with a 1064-nm pulsed YAG:Nd fiber laser maintaining regimes with the duration of laser pulses from 200 ns to 8 ns. Several SWS samples have been fabricated and studied by scanning electron and optical microscopy methods.