Evaluation of Bi-stable Vibration Energy Harvester Structure by Using Parallel Curved Beams with Gravitational Acceleration

摘要

In this paper, we describe a bi-stable micro electromechanical systems (MEMS) structure using parallel curved beams for a mechanical frequency up converter. A MEMS prototype for evaluating the shock response spectrum analysis is fabricated and measured. Applying the gravitational acceleration for bias force, the bi-stable structure shows lower operation acceleration about 0.27 g than the structure without force biasing.