Thin Film Thermocouple Sensors on CMC Capable of Measuring 1500°C High Surface Temperatures

摘要

Pt/PtRh thermocouple sensor was built on the CMC surface by MEMS micro-fabrication technology and its high temperature characteristics was analyzed by high temperature cycling measurements. Such thin film sensor is capable to measure up to 1500 °C high temperature on the CMC surface, a good indication to embed high-temperature sensor on the blade surface. A good and repeatable characteristics of such sensor is observed and the measurement error is less than ±0.2%. Temperature cycling and thermal shock tests were also performed to verify temperature stress effect on robustness and stability. Transient test indicates its responsive speed can reach up to 1 Oμs. Integrating thin film thermocouples on the surface of the CMC provides a good opportunity of accurate surface temperature characterization of next generation smart aero-engines.