Transient Dynamical-Thermal-Optical System Modeling and Simulation

摘要

In this work, methods and procedures are investigated for the holistic simulation of the dynamical-thermal behavior of high-performance optics like lithography objectives. Flexible multibody systems in combination with model order reduction methods, finite element thermal analysis and optical system analyses are used for transient simulations of the dynamical-thermal behavior of optical systems at low computational cost.