Deformed microcavities with very high Q-factors and directional farfield emis-sion

摘要

We report the design and optimized fabrication of deformed whispering gallery mode resonators in silica with solely ICP-RIE. This allows us to control the morphology of the resonators more freely and results in low surface roughness. The lighl was coupled into the resonator using a state of the art tapered liber approach and we determined the Q-factor in the range of 10.