Micro-Texturing into the Graphite Part for Joining and Packaging

摘要

Pyrolytic graphite with the vertically oriented graphene (VG) planes along the thickness has grown up as one of the most exotic materials. Its high thermal conductivity and high specific strength were suitable for electronic components. The micro-textures were necessary to join the VG for heat distribution with the transistors for packaging into an electronic device. In the present study, the high-density oxygen plasma etching was utilized to make micro-texturing into the VG specimen. The micro-lines were drawn onto the VG surface as a mask. The hollow-cathode oxygen plasma was utilized to intensify the high oxygen ion and electron densities for the etching process. The sharp-edge profile was formed on the surface of VG after etching process for 7.2 ks. This high etching rate was attained to be 13 μm/h for the VG specimen. The locally disordered substructure on the etched surface was detected by using the Raman spectroscopy. The electrical resistivity was observed in the etched and masked area of VG specimen after the etching process.